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SVG Developer

SVG Develop Tracks, svgdev/svgdev2

The SVG (Silicon Valley Group) developer is an automated system with two independent tracks (svgdev and svgdev2) for developing and post-baking exposed photoresist-coated 4" wafers. Each track system includes two stations: a spin station which dispenses and rinses away developer; and an oven station for post-bake.

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