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ASML Training, Mahnaz

Our asml is 5500/60 model * 5:1 reducing stepper * Maximum die width = 18 mm; Maximum die height = 22.6 mm (actual maximum die is slightly smaller) * I-line (365 nm) with NA (numerical Aperture 0.54) * alignment accuracy of 60 nm. * Typical resolution to 0.45 microns I have been able to do .3 um isolated lines. * 5" quartz reticle masks, 90 to 120 mil thick. Wafer thickness has to be less than 1.1 millimeter.

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