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ASML: Supporting documents for Combining Zero/First Layers

ASML: Step-by-step instructions for Combining Zero/First Layers

To convert your ASML job file from exposing your zero and first layers separately to exposing your zero and first layers together, apply the following steps on the ASML tool.

ASML: Step-by-step instructions for Combining Zero/First Layers - Read More…

Litho Toolbox

The rules for accessing the Lithography Toolbox are included here.

Litho Toolbox - Read More…

Utility Mask request form

Supply this form to SNF Litho staff to request access to the "utility mask," the SNF copy of the mask with ASML alignment marks.

Utility Mask request form - Read More…

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