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ASML: Step-by-step instructions for Combining Zero/First Layers

To convert your ASML job file from exposing your zero and first layers separately to exposing your zero and first layers together, apply the following steps on the ASML tool.

You must understand the risks and cautions with combining zero/first layers and must have your process approved by SNF litho staff before using the ASML tool as described below. Read the instructions pertaining to this here: ASML: SNF Utility Mask & Combining Zero/First Layers. SNF ( Mahnaz) and ASML (Makoto) tested the Zero/ first layer combined.

We combined zero/1st layer and ran a second layer with a 640 nm

Shift in Y position.

Overlay errors are measured between the

Zero/1st layer and 2nd layer

ASML combi reticle

Utility reticle

Pm vs. XPA marks

We noted very little differences in overlay results between pm, XPA marks or ASML combi reticle VS. Utility reticle.

ASLM Overlay01ASLM Overlay02

 

As I have mentioned this many times, we do not encourage this at all.

 

 Warning: After completing this set of steps, you will need to load an alignment marks mask in the same SMIF box that your own mask is in.

You MUST NOT open the "ASML only" SMIF boxes for the alignment marks mask. Coordinate with SNF Litho staff for access to an SNF copy of the alignment marks mask.

 

[1] Load your job file for editing.  
[2] Go to "2 - Layer Layout".  
[3] Go to "4 - Process Data".  
[4] Press "Next" to select your first layer. asml_CombZeroFirst_a 
[5] Check off "Combined zero/first layer" so that "Y" instead of "N" appears.  asml_CombZeroFirst_b
[6] Press "Apply".  asml_CombZeroFirst_c
[7] Press "Exit" once.  
[8] Go to "2 - Marks Exposure" (if you are not still in the menu choices for 2-Layer Layout, you pressed Exit too many times).  
[9] Press "Next" to select your first layer.  asml_CombZeroFirst_d
[10] Notice "Combined Mark/Image Exposure" is not toggled "Y" (and also cannot be selected). This is normal.  asml_CombZeroFirst_e
[11] Check off "Mark Exposure" so it is toggled "Y".  asml_CombZeroFirst_f
[12] Make sure all the marks you want exposed in your zero layer have a black box around them (select them if not).  asml_CombZeroFirst_g
[13] Press "Add".  asml_CombZeroFirst_h
[14] Verify the Exposed Marks (bottom right of screen) all are now white instead of black (meaning they will be exposed with this layer).  asml_CombZeroFirst_i
[15] Notice "Combined Mark/Image Exposure" still isn't "Y". It simply has not updated. Press "Previous" and then "Next" and see this update to "Y".  
asml_CombZeroFirst_j
asml_CombZeroFirst_k
[16] You can now save your job file.  
[17] Recommended checks to see this is enabled properly include:

-Check menu "2 - Layer Layout" > "5 - Reticle Data" to see that "Combined Mark/Image Exposure" is "Y" there as well.

-When you load your job in Batch Control, check that the tool includes alignment marks among the images to be exposed in Layer 1. You will need to set an exposure dose for your marks, of course.

-Note that you will need to load a mask with the alignment marks along with your own mask.
You MUST NOT open the ASML SMIF boxes to retrieve the ASML employee-only alignment marks mask.
Coordinate with SNF Litho staff about getting access to an SNF copy of the alignment mark mask.

 asml_CombZeroFirst_l

 

 

 

 

 

 

 

 

 

 

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