Skip to content. | Skip to navigation

Sections
Personal tools

ASML PAS 5500/60

* 5:1 reducing stepper * Maximum die width = 18 mm; Maximum die height = 22.6 mm (actual maximum die is slightly smaller) * I-line (365 nm) * alignment accuracy of 60 nm. * Typical resolution to 0.45 microns * 5" reticle masks, 90 to 120 mil thick.

Picture and Location


 

The tool is located at EF12 on the Lab Map.

Background

 

Process Capabilities

Cleanliness Standard

 

Performance of the Tool

What the Tool CAN do

  • Item A.

 

What the Tool CANNOT do

  • Item A.

 

Process Monitoring

 

Contact List and How to Become a User

 

Operating Procedures

 

Process Monitoring and Machine Qualification

Tool Qualification Run

 

Frequency

 

Procedure

 

Responsibility

 

 

Recommendation to users with critical processes

 

Machine Status States

Red:

Yellow:

Green:

 

Process Monitoring Results

Document Actions