Skip to content. | Skip to navigation

Personal tools
You are here: Home / Equipment / Optical Photolithography Overview / Exposure Tool Summary / KarlSuss Aligner / KarlSuss MA-6 Aligner, karlsuss & karlsuss2

KarlSuss MA-6 Aligner, karlsuss & karlsuss2

The Karl Suss MA-6 Contact Aligner system can perform precision mask-to-wafer front- or back-side alignment and near-UV photoresist exposure in hard- and soft- contact, as well as high and low vacuum contact; proximity is not available. Our current configuration accommodates 3", 4" and 6" wafers and pieces. SNF has two MA-6 aligners (karlsuss and karlsuss2).

Document Actions