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Blue M Oven

Th BlueM oven is for high temperature bakes , i.e. polyimide at temps of 200°C to 437°C.

Picture and Location

BlueM Oven 

The tool is located at FG12 on the Lab Map.

 

Process Capabilities

Cleanliness Standard

The BlueM oven is in the Gold Equipment Group.  

Performance of the Tool

Th BlueM oven is for high temperature bakes , i.e. polyimide at temps of 200°C to 437°C. You are not allowed to use Teflon cassettes, only quartz boats can be used (located on top of the oven). The Blue M is programmable. Leave a note on the front of it if you are using it (name, date time in and date and time out, and temperature it is being run at).

 

How to Become a User

  1. "All Litho" is required before training on any of the lithography tools. Contact the trainers for the class schedule and training materials (which must be reviewed before the class).
  2. Read all material on the SNF website concerning this tool, including Background, Process Capabilities, Operating Procedures and Process Monitoring.
  3.  View the YES oven movie.
  4.  Contact SNF training contact on the Equipment Summary page.

 

Operating Procedures

 

 coming soon

 

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