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Resist Coat, Tool Summary

Equipment Name  Use  Resist Materials/
Equip Group
Wafer size
 Comment
Headway Manual Resist Spinner  Manual resist spinning
Adjustable spin speeds, spin time
Shipley 3612
SPR220-7
Ebeam Resists
SNF-acceptable fluids
All Pieces to 6 inch wafers
 
Laurell Manual Resist Spinner
 Manual resist spinning
Adjustable spin speeds, spin time, ramps
Shipley 3612
SPR220-7,
Ebeam resist,
3617M.
All Pieces to 6 inch wafers No polyimides or LOL2000 are allowed
EVG 101 Spray Coater
Spray coating of resists
TBD
All
Pieces to 6 inch wafers

SVG Resist Coat Track 1  Automatic Resist/Bake
Shipley 3612
SPR220-7
SPR220-3
All 4 inch wafers
 
 SVG Resist Coat Track 2  Automatic HMDS/Resist/Bake SPR 955 CM-.7
Shipley 3612
Shipley 3617m
 All  4 inch wafers  

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