Skip to content. | Skip to navigation

Sections
Personal tools
You are here: Home / Equipment / Optical Photolithography Overview / Resist Coat, Tool Summary / EV101 Spray coater Information

EV101 Spray coater Information

EVG 101 Spray Coater (evgspraycoat)
The EVG 101 spray coater allows pieces up to 6" wafers to be spray coated with photoresists and potentially other types of polymers or atomizable materials.
Characterization
This folder contains characterization information including trends, EE412 project final reports, use of HMDS, etc...

Document Actions