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EV101 Spray coater

EVG 101 Spray Coater (evgspraycoat)
The EVG 101 spray coater (coral name = evgspraycoat) allows pieces up to 6" wafers to be spray coated with photoresists and potentially other types of polymers or atomizable materials.
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File HMDS vs no HMDS
Courtesy of Linda Whittelsey
File Investigation of nozzle pressure, spin speed,# of passes
Courtesy of Linda Whittelsey
File SPR220-7 mixture
Courtesy of Pierre Ponce
File SPR220-7 results
Courtesy of Pierre Ponce
File Spray coating data
Spray coating files and data. Courtesy Robert Hennessy (rhenn@snf).
File EE412 Deep trench spray coating
Data, measurements, weekly updates and final presentation and report done as part of class
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