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List of Coat Programs Track 1 new

SVG COATER TRACK 1

 

NOTE: You MUST always close the plastic doors!

The following programs should NOT be changed!

STANDARD COAT PROGRAMS


3612 resist 1.0µm with 2mm or 5mm Edge Bead Removal (EBR)

(dispenser 2) (COAT PROGRAM# 7)

Event

Operation

  Arm 

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

1

00.4

0.25

40

3

DISP2

9

0.00

0.25

40

4

SPIN

5

30.0

5.50

05

 5
 EBR (bottom)
0
15.0
0.5
 50
6
WASH
6 for 2mm
OR
7 for
5 mm
15.0
2.0
50
7
SPIN
0
10.0
5.00
05

8

END

0

0

0

0

 

3612 resist 1.6 µm with 2mm EBR

 (dispenser 2) (COAT PROGRAM# 8)

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

1

00.4

0.25

40

3

DISP2

9

0.00

0.25

40

4

SPIN

5

30.0

2.00

05

 5
 EBR (bottom)
 0
 15.0
 0.5
 50
6
WASH
6
15.0
2.0
50
7
SPIN
0
15.0
2.00
05

8

END

0

0

0

0


3612 RESIST 1.0µm or 1.6µm without EBR

(dispenser 2) (COAT PROGRAM#2)

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

1

00.4

0.25

40

3

DISP2

9

0.00

0.25

40

4

SPIN

8

30.0

5.50...(1µm) OR
2.0..(1.6µm)

05

5

END

0

0

0

0

 

 220-3 resist 3.0 µm or 4 µm without EBR

(dispenser 3) (COAT PROGRAM# 5) 

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

3

03.0

0.25

40

3

DISP3

4

0.00

0.25

40

4

SPIN

0

1.5

0.35

40

5
SPIN
5
30.0
2.6....(3µm) OR
1.5 ...(4µm)
05
6
END
0
0
0
0
 


220-3 RESIST 3.0 µm or 4 µm with EBR

(dispenser 3) (COAT PROGRAM# 5)

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

3

03.0

0.25

40

3

DISP3

4

0.00

0.25

40

4

SPIN

0

1.5

0.35

40

5
SPIN
5
30.0
2.6....(3µm) OR
1.5 ...(4µm)
05
 6
 EBR (bottom)
 0
 15
 0.5
 50
7
WASH
6
15.0
2.00
05
8
SPIN
0
20.0
2.0
05

9

END

0

0

0

0

Additional information for spin speed events 5 and 8:
RPM 3.5 Bake 100 seconds at 90°C plus 100 seconds at 115°C: resist thickness 2.75 µm
RPM 3.0 Bake 100 seconds at 90°C plus 100 seconds at 115°C: resist thickness 3.0 µm
RPM 3.0 Bake 200 seconds at 90°C : resist thickness 3.05 µm
(Recommended: Wait for one hour after the spin.)
Development: developer track recipe #7

 

 


SPR220-7 resist 7.0 µm, 10.0 µm or 15 µm with 2mm EBR

 (dispenser 1) (COAT PROGRAM#4 )

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

3

02.0

5.00

40

2

SPIN

5

00.5

0.15

40

3

DISP1

2

0.00

0.15

40

4

SPIN

0

00.5

0.50

05

5

SPIN

0

40.0

3.50...(7µm)
1.7..(10µm)
1.00.(15µm)

05

 6
 EBR
 8
 15
 0.5
 40
7
WASH
6
15.0
2.0
40
8
SPIN
0
10.0
3.50...(7µm)
1.7..(10µm)
1.0..(15µm)
40

9

END

0

0

0

0



 


 SPR220-7 resist 7.0 µm, 10.0 µm or 15 µm without EBR

(dispenser 1) (COAT PROGRAM#6)

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

3

02.0

5.00

40

2

SPIN

5

00.5

0.15

40

3

DISP1

2

0.00

0.15

40

4

SPIN

0

00.5

0.50

05

5

SPIN

1

40.0

3.50...(7µm)
1.7..(10µm)
1.0..(15µm)

05

6
END
0
0
0
0
 

Edge Bead Removal only

(COAT PROGRAM#1)

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

5

10.00

0.25

05

3

WASH

6

30.0

2.0

50

4

SPIN

0

10.0

5.00

05

5

END

0

0

0

0

 

 


EBEAM RESIST ONLY!! ( manually pour resist)

(COAT PROGRAM#3 )

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

5.00

40

2

SPIN


(Dispense here)

0

10.00

0.10

20

3

SPIN

0

05.0

0.25

40

4

SPIN

0

30.0

5.00


(defines thickness)

05

5

END

0

0

0

0


  Skip coat station:

 (COAT PROGRAM#9)

Event

Operation

Arm

Time

Speed

Accel

1

END

0

0

0

0

 

STANDARD BAKE PROGRAMS:

 

Temp 90°C for 60 seconds

For 3612 resist 1 µm and for Shipley 3617m resist 1.6µm

 

(BAKE PROGRAM#1)

 

Event

Operation

Time

1

BAKE

60.0

2

COOL

005.0

3

END

0

 

Temp 90°C for 120 seconds

 

For 3612 resist 1.6 µm

(BAKE PROGRAM#2)


Event

Operation

Time

1

BAKE

120.0

2

COOL

005.0

3

END

0

 

 

FOR SPR220-7 resist (7 µm or 10 µm) use BAKE PROGRAM #3 or #4:

BAKE PROGRAM#3

(Bake at 90°C for 200 seconds)

Event

Operation

Time

1

BAKE

200.0

2

COOL

005.0

3

END

0

 

OR for better results use the

Combination Bake: 90°C for 100 seconds followed by a hotplate bake of 100 seconds at 115°C.

 

BAKE PROGRAM#4

Event

Operation

Time

1

BAKE

100.0

2

COOL

005.0

3

END

0

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