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List of Coat Programs Track 1 new

SVG COATER TRACK 1

Overview of standard coat and standard bake programs.

NOTE: You MUST always close the plastic doors!

NOTE: The following programs should NOT be changed!

 

Standard Coat Programs

Coat programs are organized by PR type. Standard programs should NOT be changed.

NOTE: EBR stands for "Edge Bead Removal".

 

3612 Resist Coat Programs

 

3612 Resist: 1.0 µm with 2mm or 5mm EBR

Dispenser 2, COAT PROGRAM #7

Event

Operation

  Arm 

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

1

00.4

0.25

40

3

DISP2

9

0.00

0.25

40

4

SPIN

5

30.0

5.50

05

 5
 EBR (bottom)
0
15.0
0.5
 50
6
WASH
6 for 2mm
OR
7 for
5 mm
15.0
2.0
50
7
SPIN
0
10.0
5.00
05

8

END

0

0

0

0

 

 

3612 Resist: 1.6 µm with 2mm EBR

Dispenser 2, COAT PROGRAM #8

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

1

00.4

0.25

40

3

DISP2

9

0.00

0.25

40

4

SPIN

5

30.0

2.00

05

 5
 EBR (bottom)
 0
 15.0
 0.5
 50
6
WASH
6
15.0
2.0
50
7
SPIN
0
15.0
2.00
05

8

END

0

0

0

0

 

 

3612 Resist: 1 µm or 1.6 µm without EBR

Dispenser 2, COAT PROGRAM #2

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

1

00.4

0.25

40

3

DISP2

9

0.00

0.25

40

4

SPIN

8

30.0

5.50...(1µm) OR
2.0..(1.6µm)

05

5

END

0

0

0

0

 

 

 

220-3 Resist Coat Programs

220-3 Resist:  3.0 µm or 4 µm without EBR

Dispenser 3, COAT PROGRAM #5

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

3

03.0

0.25

40

3

DISP3

4

0.00

0.25

40

4

SPIN

0

1.5

0.35

40

5
SPIN
5
30.0
2.6....(3µm) OR
1.5 ...(4µm)
05
6
END
0
0
0
0
 

 

220-3 Resist: 3.0 µm or 4 µm with EBR

Dispenser 3, COAT PROGRAM #5

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

3

03.0

0.25

40

3

DISP3

4

0.00

0.25

40

4

SPIN

0

1.5

0.35

40

5
SPIN
5
30.0
2.6....(3µm) OR
1.5 ...(4µm)
05
 6
 EBR (bottom)
 0
 15
 0.5
 50
7
WASH
6
15.0
2.00
05
8
SPIN
0
20.0
2.0
05

9

END

0

0

0

0

Additional information for spin speed events 5 and 8:

  • RPM 3.5 Bake 100 seconds at 90°C plus 100 seconds at 115°C: resist thickness 2.75 µm
  • RPM 3.0 Bake 100 seconds at 90°C plus 100 seconds at 115°C: resist thickness 3.0 µm
  • RPM 3.0 Bake 200 seconds at 90°C: resist thickness 3.05 µm

(Recommended: Wait for one hour after the spin.)
Development: developer track recipe #7

 

 

SPR220-7 Resist Coat Programs


SPR220-7 Resist: 7.0 µm, 10.0 µm, or 15 µm with 2mm EBR

Dispenser 1, COAT PROGRAM #4

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

3

02.0

5.00

40

2

SPIN

5

00.5

0.15

40

3

DISP1

2

0.00

0.15

40

4

SPIN

0

00.5

0.50

05

5

SPIN

0

40.0

3.50...(7µm)
1.7..(10µm)
1.00.(15µm)

05

 6
 EBR
 8
 15
 0.5
 40
7
WASH
6
15.0
2.0
40
8
SPIN
0
10.0
3.50...(7µm)
1.7..(10µm)
1.0..(15µm)
40

9

END

0

0

0

0

 

SPR220-7 Resist: 7.0 µm, 10.0 µm, or 15 µm without EBR

Dispenser 1, COAT PROGRAM #6

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

3

02.0

5.00

40

2

SPIN

5

00.5

0.15

40

3

DISP1

2

0.00

0.15

40

4

SPIN

0

00.5

0.50

05

5

SPIN

1

40.0

3.50...(7µm)
1.7..(10µm)
1.0..(15µm)

05

6
END
0
0
0
0
 

 

Other Programs

Edge Bead Removal Only

COAT PROGRAM #1

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

5

10.00

0.25

05

3

WASH

6

30.0

2.0

50

4

SPIN

0

10.0

5.00

05

5

END

0

0

0

0

 

EBEAM RESIST ONLY!! (manually pour resist)

COAT PROGRAM #3

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

5.00

40

2

SPIN


(Dispense here)

0

10.00

0.10

20

3

SPIN

0

05.0

0.25

40

4

SPIN

0

30.0

5.00


(defines thickness)

05

5

END

0

0

0

0


Skip Coat Station

COAT PROGRAM #9

Event

Operation

Arm

Time

Speed

Accel

1

END

0

0

0

0

 

Standard Bake Programs

3612 Resist Bake Programs

 

For 3612 resist 1 µm: Temp 90°C for 60 seconds:

BAKE PROGRAM #1

Event

Operation

Time

1

BAKE

60.0

2

COOL

005.0

3

END

0

 

 

For 3612 resist 1.6 µm: Temp 90°C for 120 seconds:

BAKE PROGRAM #2

Event

Operation

Time

1

BAKE

120.0

2

COOL

005.0

3

END

0

 

 

SPR220-7 Resist Bake Programs

For SPR220-7 Resist (7um or 10um), use Bake Program #3 or #4:

 

BAKE PROGRAM #3

(Bake at 90°C for 200 seconds)

Event

Operation

Time

1

BAKE

200.0

2

COOL

005.0

3

END

0

OR for better results use the Combination Bake: 90°C for 100 seconds followed by a hotplate bake of 100 seconds at 115°C

 

BAKE PROGRAM #4

Event

Operation

Time

1

BAKE

100.0

2

COOL

005.0

3

END

0

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