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List of Coat Programs Track 2 new

SVG COATER TRACK 2

 

NOTE: You MUST always close the plastic doors!

NO MANUAL DISPENSE IS ALLOWED!

The following programs should NOT be changed!

STANDARD PRIME PROGRAM

SVGCOAT HMDS Vapor Prime Oven

PRIME PROGRAM#1

Event

Operation

Time

1

VBAKE

10:0

2

PRIME

5.0

3

VBAKE

5.0

4

PRIME

5.0

5

VBAKE

5.0

6

PRIME

5.0

7

VBAKE

5.0

8
 BAKE
10.0
 9
 COOL
 5.0

 

  STANDARD COAT PROGRAMS:

 

3612 RESIST 1.0µm  with Edge Bead Removal (EBR)

(dispenser 1) COAT PROGRAM# 7

 


Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

4

00.4

0.25

40

3

DISP1

9

0.00

0.25

40

4

SPIN

5

30.0

5.50

05

5
EBR (bottom)
0
15.0
0.50
50
6
WASH
6
15.0
2.00
50
7
SPIN
0
10.0
5.00
05

8

END

0

0

0

0

 

3612 RESIST 1.6 µm with EBR

(dispenser 1) COAT PROGRAM# 8

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

4

00.4

0.25

40

3

DISP1

9

0.00

0.25

40

4

SPIN

5

30.0

2.00

05

5
EBR (bottom)
0
20.0
0.50
50
6
WASH
6
20.0
2.00
50
7
SPIN
0
15.0
2.00
05

8

END

0

0

0

0

 

3612 RESIST 1.0µm or 1.6 µm without EBR

(dispenser 1) COAT PROGRAM#2

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

4

00.4

0.25

40

3

DISP1

9

0.00

0.25

40

4

SPIN

8

30.0

5.50 ....(1µm)
2.00...1.6µm)

05

5

END

0

0

0

0

 

 

 

I Line SPR 955 CM-0.7 RESIST 0.7 µm to 1 µm with 2mm or 5mm EBR

(dispenser #3) COAT PROGRAM #5

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

10

4.00

40

2

SPIN

4

0.4

0.25

40

3

DISP3

1

 

0.25

40

4

SPIN

5

30.0

3.3..(0.7µm)
1.70...(1µm)
2.10.(0.9µm)

05

 5
 EBR
 0
15.0
 0.50
 50
6
WASH
6.....(2mm)
7.....(5mm)
15.0
2.0
50
7
SPIN
8
10.0
5.00
05

8

END

0

0

0

0



 

 

FOR GLASS/QUARTZ WAFERS:

 

3617m RESIST 1.6µm with EBR

(dispenser 3) COAT PROGRAM


Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

010.0

4.00

40

2

SPIN

4

0.40

0.25

40

3

DISP2

1


0.25

40

4

SPIN

5

30.0

4.80..(1.6µm)
3.10 ...(2µm)

05

5
WASH
6
30.0
2.0
50
6
SPIN
0
10.0
5.0
5
7
END
0
0
0
0

Additional information for event 4, speed:

5.5 RPM 60sec Bake: 1.5 µm

7.0 RPM 60sec Bake: 1.34 µm

8.0 RPM 70sec Bake: 1.26 µm


 

 

STANDARD BAKE PROGRAMS:

BAKE PROGRAM#1 FOR 3612 resist (1 µm) Temp 90°C

Event

Operation

Time

1

BAKE

60.0

2

COOL

005.0

3

END

0

 BAKE PROGRAM#2 FOR 3612 resist (Recommended FOR 1.6 µm)Temp 90°C and for I Line SPR 955 CM-0.7 RESIST

Event

Operation

Time

1

BAKE

120.0

2

COOL

005.0

3

END

0

BAKE PROGRAM#3 Bake at 90°C for 200 seconds

Event

Operation

Time

1

BAKE

200.0

2

COOL

005.0

3

END

0

 OR for better results use the:

COMBINATION BAKE: 90°C for 100 seconds followed by a hotplate bake of 100 seconds at 115°C.
BAKE PROGRAM#4

Event

Operation

Time

1

BAKE

100.0

2

COOL

005.0

3

END

0

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