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List of Coat Programs Track 2 new

SVG COATER TRACK 2

Overview of standard coat and standard bake programs.

NOTE: You MUST always close the plastic doors!

 

NO MANUAL DISPENSE IS ALLOWED!

NOTE: The following programs should NOT be changed!

 

STANDARD PRIME PROGRAM

SVGCOAT HMDS Vapor Prime Oven

 

PRIME PROGRAM #1

Event

Operation

Time

1

VBAKE

10:0

2

PRIME

5.0

3

VBAKE

5.0

4

PRIME

5.0

5

VBAKE

5.0

6

PRIME

5.0

7

VBAKE

5.0

8
 BAKE
10.0
 9
 COOL
 5.0

 

 

STANDARD COAT PROGRAMS

Coat programs are organized by PR type. Standard programs should NOT be changed.

NOTE: EBR stands for "Edge Bead Removal".

 

3612 Resist: 1.0 µm with EBR

Dispenser 1, COAT PROGRAM #7

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

4

00.4

0.25

40

3

DISP1

9

0.00

0.25

40

4

SPIN

5

30.0

5.50

05

5
EBR (bottom)
0
15.0
0.50
50
6
WASH
6
15.0
2.00
50
7
SPIN
0
10.0
5.00
05

8

END

0

0

0

0

 

 

3612 Resist: 1.6 µm with EBR

Dispenser 1, COAT PROGRAM #8

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

4

00.4

0.25

40

3

DISP1

9

0.00

0.25

40

4

SPIN

5

30.0

2.00

05

5
EBR (bottom)
0
20.0
0.50
50
6
WASH
6
20.0
2.00
50
7
SPIN
0
15.0
2.00
05

8

END

0

0

0

 

 

3612 Resist: 1.0 µm or 1.6 µm without EBR

Dispenser 1, COAT PROGRAM #2

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

02.0

4.00

40

2

SPIN

4

00.4

0.25

40

3

DISP1

9

0.00

0.25

40

4

SPIN

8

30.0

5.50 ....(1µm)
2.00...1.6µm)

05

5

END

0

0

0

 

 

I Line SPR 955 CM-0.7 RESIST 0.7 µm to 1 µm with 2mm or 5mm EBR

Dispenser 3, COAT PROGRAM #5

Event

Operation

Arm

Time

Speed

Accel

1

SPIN

0

10

4.00

40

2

SPIN

4

0.4

0.25

40

3

DISP3

1

 

0.25

40

4

SPIN

5

30.0

3.3..(0.7µm)
1.70...(1µm)
2.10.(0.9µm)

05

 5
 EBR
 0
15.0
 0.50
 50
6
WASH
6.....(2mm)
7.....(5mm)
15.0
2.0
50
7
SPIN
8
10.0
5.00
05

8

END

0

0

0

 

 

Image Reversal Resist

 

AZ5214IR RESIST 1.26, 1.4, 1.6 and 2 µm with EBR

Dispenser ?, COAT PROGRAM #?

Event

Operation

Arm

Time

Speed

Accel

1

SPIN



 


2

SPIN


 

 


3

DISP2

 


 


4

SPIN





 

5
WASH




6
SPIN




7
END




 

 

STANDARD BAKE PROGRAMS

 

BAKE PROGRAM #1

For 3612 resist (1 µm) Temp 90°C

Event

Operation

Time

1

BAKE

60.0

2

COOL

005.0

3

END

0

 

BAKE PROGRAM #2

For 3612 resist (Recommended FOR 1.6 µm) Temp 90°C and for I Line SPR 955 CM-0.7 RESIST

Event

Operation

Time

1

BAKE

120.0

2

COOL

005.0

3

END

0

 

BAKE PROGRAM #3

Bake at 90°C for 200 seconds

Event

Operation

Time

1

BAKE

200.0

2

COOL

005.0

3

END

0

 

OR for better results use the:

 

COMBINATION BAKE (BAKE PROGRAM #4)

90°C for 100 seconds followed by a hotplate bake of 100 seconds at 115°C

Event

Operation

Time

1

BAKE

100.0

2

COOL

005.0

3

END

0

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