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You are here: Home / Equipment / Optical Photolithography Overview / Resist Coat, Tool Summary / SVG Coat Tracks 1&2 / Rules for Operating svgcoat/svgcoat2

Rules for Operating svgcoat/svgcoat2

SVG Coat Track 1 Users: Please READ!

Do not change the following programs:

 

 

Coat Program 1 - Edge Bead Removal (EBR) only

Coat Program 2 - SPR 3612 resist 1µm or 1.6µm (dispenser 1) without EBR

Coat Program 3 - Ebeam manual dispense - ONLY SPIN SPEED and time may be changed
                            only: PMMA 2%, PMMA 5%, UVN30

Coat Program 4 - SPR220-7 resist 7.0µm, 10µm or 15 µm (dispenser 2) with 2mm EBR

Coat Program 5 - SPR220-3 resist 3.0µm to 4.0µm (dispenser 3) with or without EBR

Coat Program 6 - SPR220-7 resist 7.0µm, 10µm or 15µm (dispenser 2) without EBR

Coat Program 7 - SPR 3612 resist 1.0µm (dispenser 1) with 2mm or 5mm EBR

Coat Program 8 - SPR 3612 resist 1.6µm (dispenser 1) with 2mm EBR

Coat Program 9- skip coat station: 1 Event End

 

Prebake Program 1 - 90°C, 60 seconds

                                 for 3612 resist 1.0µm

Prebake Program 2 -  90°C, 120 seconds

                                  for 3612 resist 1.6µm

Prebake Program 3 - 90°C, 200 seconds

                                  for SPR220-7 resist 7.0µm and SPR220-3 resist 3.0µm to 4.0µm

Prebake Program 4 - COMBINATION BAKE for 100 seconds

                                  and followed with 100 seconds at 115°C on one of the programmable hot plates

Never change any of these Programs or Bake Temperatures!
Failure to follow these rules will result in removal from user list, mandatory re-training, and community service!

 

 

 

SVG Coat Track 2 Users: Please READ!

Do not change the following programs:

Prime Program 1 - Standard HMDS Prime Program at 125°C

 

Coat Program 2 - SPR 3612 resist 1µm or 1.6µm (dispenser 1) without Edge Bead Removal (EBR)

Coat Program 5 - I Line SPR 955 CM-0.7 resist 0.7µm to 1.0µm (dispenser 3)
                            with 2mm or 5mm
EBR

Coat Program 7 - SPR 3612 resist 1.0µm (dispenser 1) with 2mm EBR

Coat Program 8 - SPR 3612 resist 1.6µm (dispenser 1) with 2mm EBR

Coat Program    - Shipley 3617m resist 1.2µm, 1.6µm to 2µm (dispenser 2) for glass/quartz wafers
                           with
2mm EBR

Coat Program 9- skip coat station: 1 Event End

 

Prebake Program 1 - 90°C, 60 seconds

                                  for SPR 3612 resist 1.0µm and for Shipley 3617m resist 1.6µm

Prebake Program 2 - 90°C, 120 seconds

                                  for SPR 3612 resist 1.6µm and I Line SPR 955 CM-0.7 resist 0.7 to 1µm

Prebake Program 3 - 90°C, 200 seconds

                                  for SPR220-3 resist 3.0µm to 4.0µm

Prebake Program 4 - COMBINATION BAKE for 100 seconds

                                 and followed with 100 seconds at 115°C on one of the programmable hot plates



Never change any of these Programs or Bake Temperatures!
Failure to follow these rules will result in removal from user list, mandatory re-training, and community service!

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