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Wet Bench Clean Checklist

Checklist for clean and semi-clean Wet Benches

Each aspiring user of the wet benches should be able to explain and demonstrate the following before using any wet bench:

 

  • What to check before enabling the wet bench (AWN/exhaust/power on/clean bench).
  • What to do in case there is not enough exhaust.
  • What to do in case of an AWN alarm.
  • How to deal with a chemical spill on the bench top or the floor. 
  • Reservation rules.
  • What to do if bench is already enabled by another user.
  • Contamination level at this bench (acceptable materials?).
  • Which chemicals are used at this bench and what are the hazards of each chemical.
  • Identify the solution in each of the baths and their functions, temperatures, and times.
  • Where to obtain chemicals and how to properly transport them.
  • How to pour (two handed pouring technique) and mix the chemicals (measuring dip stick/sequence).
  • Necessary protective gear for transferring, pouring chemicals or wafer processing.
  • Point out the nearest safety shower and eye wash.
  • Know where the HF kits are and how to use.
  • Dedicated cassettes.
  • Wafer transfer procedures to dedicated cassettes (tweezers/roll transfer cassette to cassette).
  • Glove cleanliness precautions.
  • How to drain chemicals.
  • List the functions of the main interlocks (low level, temperature and DRAIN/ASP valve).
  • List the functions of all the buttons on each of the controller panels.
  • Correct use of the dump rinser and how to leave it (water level/lid).
  • Proper use of spin/rinse dryer (backups).
  • How to fill out the chemicals change log sheet.
  • Show awareness of clean and dirty areas of the bench.
  • Example for shutdown/problem/comment.

 

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