Wet Bench Clean Checklist
Checklist for clean and semi-clean Wet Benches
Each aspiring user of the wet benches should be able to explain and demonstrate the following before using any wet bench:
- What to check before enabling the wet bench (AWN/exhaust/power on/clean bench).
- What to do in case there is not enough exhaust.
- What to do in case of an AWN alarm.
- How to deal with a chemical spill on the bench top or the floor.
- Reservation rules.
- What to do if bench is already enabled by another user.
- Contamination level at this bench (acceptable materials?).
- Which chemicals are used at this bench and what are the hazards of each chemical.
- Identify the solution in each of the baths and their functions, temperatures, and times.
- Where to obtain chemicals and how to properly transport them.
- How to pour (two handed pouring technique) and mix the chemicals (measuring dip stick/sequence).
- Necessary protective gear for transferring, pouring chemicals or wafer processing.
- Point out the nearest safety shower and eye wash.
- Know where the HF kits are and how to use.
- Dedicated cassettes.
- Wafer transfer procedures to dedicated cassettes (tweezers/roll transfer cassette to cassette).
- Glove cleanliness precautions.
- How to drain chemicals.
- List the functions of the main interlocks (low level, temperature and DRAIN/ASP valve).
- List the functions of all the buttons on each of the controller panels.
- Correct use of the dump rinser and how to leave it (water level/lid).
- Proper use of spin/rinse dryer (backups).
- How to fill out the chemicals change log sheet.
- Show awareness of clean and dirty areas of the bench.
- Example for shutdown/problem/comment.