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MSDS for gas chemicals. Sources include Praxair, Matheson, Voltaix, and Scott
Nitrogen Trifluoride (NF3)
Chlorine(Cl2)
Hydrogen Bromide (HBr)
100ppm Arsine in Hydrogen (100 ppm AsH3/H2)
Germane(GeH4)
1% Phosphine/Hydrogen (1%PH3/H2)
Hydrogen Chloride (HCl)
15% Phosphine in Silane (15% PH3/SiH4)
100ppm diborane in hydrogen (100ppm B2H6/H2)
1% diborane in hydrogen (1% B2H6/H2)
For any sources that don't provide the MSDS for the gas mixture, the MSDS of each component will be included instead
Nitrous Oxide (N2O)
Ammonia (NH3)
Dichlorosilane(SiH2Cl2)
5% Diborane in Hydrogen (5% B2H6/H2)
For any sources that don't offer the information for this gas mixture, the MSDS for individual components from the source will be included instead
10% Phosphine in hydrogen (10% PH3/H2)
For any sources that don't provide the MSDS for the gas mixture, the MSDS of each component will be included instead
80% Methane in Argon (80% CH4/Ar)
For any sources that don't provide the information for the gas mixture, the MSDS sheet for each component will be included instead
2% Boron Trichloride in Argon (2% BCl3/Ar)
For any sources that don't provide the information for the gas mixture, the MSDS sheet for each component will be included instead
2% Silane in Nitrogen (2%SiH4/H2)
Silane (SiH4)
Methane (CH4)
Disilane (Si2H6)
4% Hydrogen in Nitrogen (4% H2/N2)
Nitrogen (N2)
15% Arsine in Nitrogen (15% AsH3/N2)
Argon
Boron Trichloride (BCl3)
Boron Trifluoride (BF3)
Carbon Dioxide (CO2)
Chlorine (Cl2)
Halocarbon 14
Halocarbon 23
Halocarbon 22
Halocarbon 116
Helium (He)
Silicon Tetrachloride (SiCl4)
Sulfur Hexafluoride (SF6)

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