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MSDS

Acetic Acid
Corrisive acid. Strong, vinegar odor. Flammable and incompatible with oxidizers. Glacial acetic acid (pure) is stocked for labmember use at the manual acids benches (wbgeberal). Acetic acid is a component in some pre-mixed etchants.
Acetone
Highly flammable solvent, used for removing most resists and for some lift-off protocols. Available in squeeze bottles at the solvent benches.
Ammonium hydroxide
File 15% Arsine 85% Nitrogen
File Argon
File Boron Trichloride
File Boron Trifluoride
Buffered Oxide Etch
File Carbon Dioxide (Matheson)
Pressurized gas form, used for critical point drying ("cpd").
File Carbon Dioxide (Praxair)
Pressurized gas used for critical point drying ("cpd").
Chlorine
File Chlorine
File Disilane
File Dichlorosilane
EC Solvent 13
Ethylene Glycol
File Halocarbon 14
File Halocarbon 23
File Halocarbon 22
File Halocarbon 116
Hydrofluoric Acid
Hydrofluoric Dip
File Helium
File Hydrochloric Acid 37%
File Hydrogen Peroxide 3%
File Hydrogen Bromide
File Aluminum (Al) Etchant, discontinued as of 2/14/14
HMDS
Isopropyl Alcohol
LDD 26W Developer
File LOL 2000
1-methyl-2-pyrrolidinone
File Methane
MF-26A Developer
Methyl Alcohol
MF-322 Developer
MF-319 Developer
File Chrome (Cr) Etchant, discontinued
Methyl Isobutyl Ketone
File MF-CD-26 Developer
File Nitrogen Trifluoride
File Nitrogen
File Gold (Au) Etchant
File Nitric Acid 70%
File Nitrous Oxide (Air Products)
File Nitrous Oxide (Praxair)
Phosphoric Acid
File Boron Tribromide (BBr3)
Potassium Hydroxide
PRX-127 Positive Photoresist stripper/remover
File PRS 1000
Remover 1165
File Silane (Air Products)
File Silane (Praxair)
File Silicon Tetrachloride
SU-8 Developer
File SPR 220-7.0 Positive Photoresist
File SPR 955CM-0.7 Positive Photoresist
File SPR 220-3.0 Positive Photoresist
SPR 3617M Photoresist
File Sulfur Hexafluoride (Praxair)
SPR 3612 Positive Photoresist
Phosphorous Oxychloride (POCl)
File Sulfur Hexafluoride (Air Products)
Sulfuric Acid
Tetramethylammonium Hydroxide (TMAH)
File UVN 30-0.8 DUV Photoresist
Xylenes
950 PMMA Series
Praxair Online MSDS Library
Updated MSDS of chemicals provided by Praxair
Ammonia
File Ultrasol 2EX MSDS
CMP slurry Ultrasol 2EX
File Ultrasol S10 MSDS
CMP Slurry Ultrasol S10 MSDS
File CR-14 Chromium Etchant Transene

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