MSDS ALD Precursors

Material Safety Data Sheets for all Precursors used in the SNF to date. This does not necessarily mean these precursors are currently in stock or provided by the SNF.

TrimethylAluminum: Trimethylaluminum is an organo-metalic precursor used for ALD of aluminum oxide and aluminum nitride films.
Tetrakis(dimethylamido)titanium(IV) (TDMA-Ti) MSDS: Tetrakis(dimethylamido)titanium(IV) or TDMA-Ti is a precursor used for ALD of titanium oxide and titanium nitride and elemental titanium films.
Bis(ter-butylimino)bis(dimethylamino)tungsten(VI) MSDS: Material safety data sheet for Bis(ter-butylimino)bis(dimethylamino)tungsten(VI), an ALD precursor used for deposition of tungsten oxide, tungsten nitride, and elemental tungsten films.
Tetrakis(dimethylamido)hafnium(IV) MSDS: Material safety data sheet for tetrakis(dimethylamido)hafnium(IV) (aka TDMA-Hf) an ALD precursor used for hafnium oxide and hafnium nitride.
Tungsten Hexacarbonyl W(CO)6: Material safety data sheet for tungsten hexacarbonyl.
Tetrakis(dimethylamido)zirconium(IV) (TDMA-Zr) MSDS: Material safety data sheet for tetrakis(dimethylamido)zirconium(IV) (aka TDMA-Zr), an ALD precursor used for zirconium oxide.
Tetrakis(ethylmethylamido)zirconium(IV) (TEMA-Zr) MSDS: Material safety data sheet for tetrakis(ethylmethylamido)zirconium(IV) (aka TEMA-Zr), an ALD precursor used for zirconium oxide.
Tris(diethylamido)(tert-butylimido)tantalum(V): Material safety data sheet for Tris(diethylamido)(tert-butylimido)tantalum(V) (aka TDETB-Ta), an ALD precursor used for tantalum oxide and tantalum nitride.
Tris[dimethylamino]Silane (3DMAS) MSDS: Material safety data sheet for tris(dimethylamino)silane (aka 3DMAS), an ALD precursor for silicon dioxide.
(3-Aminopropyl)triethoxysilane (APTES) MSDS: Material safety data sheet for (3-Aminopropyl)triethoxysilane (aka APTES) an ALD precursor used in silicon dioxide.
Tris(tert-botoxy)silanol MSDS: Material safety data sheet for tris(tert-butoxy)silanol, an ALD precursor used for silicon dioxide.
Trimethyl(methylcyclopentadienyl)platinum(IV) MSDS: Material data safety sheet for Trimethyl(methylcyclopentadienyl)platinum(IV), an ALD precursor used for Pt.
Bis(cyclopentadienyl)nickel (nickelocene) MSDS: Material safety data sheet for Bis(cyclopentadienyl)nickel (aka nickelocene), an ALD precursor for Ni oxide and Ni films.
Bis(ethylcyclopentadienyl)ruthenium(II) MSDS: Material safety data sheet for Bis(ethylcyclopentadienyl)ruthenium(II), an ALD precursor used in the deposition of Ru.
Diethylzinc (DEZ) MSDS: Material safety data sheet for diethylzinc (DEZ), an ALD precursor used for zinc oxide.
Tris[N,N-bis(trimethylsilyl)amide]yttrium MSDS: Material safety data sheet for Tris[N,N-bis(trimethylsilyl)amide]yttrium, an ALD precursor used for yttrium oxide.
Cyclopentadienyl-indium MSDS: Material safety data sheet for Cyclopentadienylindium, which can be used as an ALD precursor for Indium oxide or Indium=Tin--Oxide (ITO).
Tetrakis(dimethylamino)tin(IV) TDMA-Sn MSDS: Material safety data sheet for tetrakis(dimethylamino)tin (aka TDMA-Sn) an ALD precursor used in making tin oxide or indium tin oxide (ITO).
Tris(cyclopentadienyl)yttrium (3CpY) MSDS: Material safety data sheet for tris(cyclopentadienyl)yttrium (aka 3CpY) a precursor for atomic layer deposition for Y2O3 and Y-stanbilized Zirconia.
Tetramethyl-Tin: Tetramethyl Tin is an organo-metallic precursor with potential use for atomic layer deposition of tin oxide.
Trimethylgallium
Bis(1,2,4-triteriarybutylcyclopentadienyl)-strontium
Bis(ethylcyclopentadienyl)nickel(II) MSDS
Ferrocene: ALD Precursor used to make Fe2O3
Titanium (IV) Isopropoxide (TTIP) MSDS: Titanium (IV) Isopropoxide MSDS for ALD
Bis(n-propyltetramethycyclopentadienyl)barium MSDS
Bis(pentamethylcyclopentadienyl)barium, 1,2-dimethoxyethane adduct MSDS
Bis(cyclopentadienyl)cobalt (II) MSDS
Fe amidinate MSDS (Accudep Iron)

Document Actions

Sections

Personal tools

MSDS ALD Precursors