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Bis(ter-butylimino)bis(dimethylamino)tungsten(VI) MSDS

Material safety data sheet for Bis(ter-butylimino)bis(dimethylamino)tungsten(VI), an ALD precursor used for deposition of tungsten oxide, tungsten nitride, and elemental tungsten films.

PDF document icon MSDS bis(tert-butylimino)bis(dimethylamino)W.pdf — PDF document, 35 kB (36485 bytes)

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