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Tris[N,N-bis(trimethylsilyl)amide]yttrium MSDS

Material safety data sheet for Tris[N,N-bis(trimethylsilyl)amide]yttrium, an ALD precursor used for yttrium oxide.

PDF document icon TBTMSA-Yttrium MSDS.pdf — PDF document, 35 kB (35860 bytes)

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