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Tris(diethylamido)(tert-butylimido)tantalum(V)

Material safety data sheet for Tris(diethylamido)(tert-butylimido)tantalum(V) (aka TDETB-Ta), an ALD precursor used for tantalum oxide and tantalum nitride.

PDF document icon TDETBA Ta MSDS.pdf — PDF document, 34 kB (35652 bytes)

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