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Tetrakis(dimethylamido)zirconium(IV) (TDMA-Zr) MSDS

Material safety data sheet for tetrakis(dimethylamido)zirconium(IV) (aka TDMA-Zr), an ALD precursor used for zirconium oxide.

PDF document icon TDMA-Zr MSDS.pdf — PDF document, 33 kB (34226 bytes)

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