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Tetrakis(dimethylamido)titanium(IV) (TDMA-Ti) MSDS

Tetrakis(dimethylamido)titanium(IV) or TDMA-Ti is a precursor used for ALD of titanium oxide and titanium nitride and elemental titanium films.

PDF document icon TDMAT-Ti-MSDSPage.pdf — PDF document, 59 kB (60518 bytes)

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