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Tetrakis(ethylmethylamido)zirconium(IV) (TEMA-Zr) MSDS

Material safety data sheet for tetrakis(ethylmethylamido)zirconium(IV) (aka TEMA-Zr), an ALD precursor used for zirconium oxide.

PDF document icon Zr-TEMAZr(eng) MSDS.pdf — PDF document, 639 kB (654911 bytes)

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