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Tetrakis(dimethylamido)hafnium(IV) MSDS

Material safety data sheet for tetrakis(dimethylamido)hafnium(IV) (aka TDMA-Hf) an ALD precursor used for hafnium oxide and hafnium nitride.

PDF document icon msds TDMAHf.pdf — PDF document, 49 kB (50846 bytes)

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