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You are here: Home / Materials/Chemicals / Process or Materials Review Requests (PROM) and Form / 2013 PROM Requests / 20130918 J. Kruger- Use of Santovac5 for thermal contact in Plasma Etch (gold systems)

20130918 J. Kruger- Use of Santovac5 for thermal contact in Plasma Etch (gold systems)

Experiments performed to identify feasibility of Santovac5 for thermal contact in gold plasma etchers.

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