20140228 M. Hou- Li2CO3 ALD
Request to perform ALD of Li2O3 in Savannah. Requires new precursors and significant handling procedural changes to address safety issues. Status: Process approved as documented. Follow up documentation of equipment is required.
- 20140228 M. Hou- Li2CO3 ALD
- PROM request for Li2CO3 ALD in Savannah. Requires new precursors, equipment modification, and procedural changes to address safety.
- LiOH (by product of reaction) MSDS
- Reference research paper for ALD of Li2CO3
- Atomic Layer Deposition of LiOH and Li2CO3 Using Lithium t-butoxide as the Lithium Source. A.S. Cavanagh, Y. Leec B. Yoonc and S.M. George
- MSDS- CO2
- MSDS for CO2
- MSDS- Lithium t-butoxide, 98%
- MSDS for ALD precursor