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20140228 M. Hou- Li2CO3 ALD

Request to perform ALD of Li2O3 in Savannah. Requires new precursors and significant handling procedural changes to address safety issues. Status: Process approved as documented. Follow up documentation of equipment is required.
File 20140228 M. Hou- Li2CO3 ALD
PROM request for Li2CO3 ALD in Savannah. Requires new precursors, equipment modification, and procedural changes to address safety.
File MSDS-LiOH
LiOH (by product of reaction) MSDS
File Reference research paper for ALD of Li2CO3
Atomic Layer Deposition of LiOH and Li2CO3 Using Lithium t-butoxide as the Lithium Source. A.S. Cavanagh, Y. Leec B. Yoonc and S.M. George
File MSDS- CO2
MSDS for CO2
File MSDS- Lithium t-butoxide, 98%
MSDS for ALD precursor

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