Skip to content. | Skip to navigation

Personal tools

20140228 M. Hou- Li2CO3 ALD

PROM request for Li2CO3 ALD in Savannah. Requires new precursors, equipment modification, and procedural changes to address safety.

Microsoft Word Document icon 20140228 M. Hou- Lithium Carbonate ALD.doc — Microsoft Word Document, 177 kB (181760 bytes)

Document Actions