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Reference research paper for ALD of Li2CO3

Atomic Layer Deposition of LiOH and Li2CO3 Using Lithium t-butoxide as the Lithium Source. A.S. Cavanagh, Y. Leec B. Yoonc and S.M. George

PDF document icon ALD of Li2CO3.pdf — PDF document, 417 kB (427116 bytes)

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