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20140307 L. Zhu Poly-Si deposition on Mo/Si substrate in ThermcoPoly2 (LPCVD)

Deposition of poly-Si on Mo/Si substrate in ThermocoPoly2 requires approval to demonstrate low vapor pressure of Mo at process conditions. Status: Approved.
File 20140307 L. Zhu Poly-Si deposition on Mo/Si substrate in ThermcoPoly2
PROM request form
File MSDS- Molybdenum
Mo purchased from Stanford Advanced Materials

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