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20140410 T. Lin- Request for Zinc Phosphorus Dopant Coating

PROM request for Zinc Phosphorous Spin on Dopant coating and anneal. Status: Rejected.
File 20140410 T. Lin- Request for Zinc Phosphorus Dopant
PROM request for spin on Zinc Phosphorus Dopant dispense and anneal in SNF. Status: Rejected.
File MSDS- Futurrex Zinc Phosphorus Dopant Coating ZPDC2-2000
Vendor provided MSDS
File Data Sheet- Futurrex ZPDC2-2000
Vendor provided data sheet
File Reference Paper- Behavior of SiNx films as masks for Zn diffusion
Reference paper from Journal of Applied Physics, Zou, Vowter, et. al

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