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20140725 A. Gupta- Etching Ctyop in PT-MTL etcher

PROM request and supporting materials to etch Cytop in PT-MTL etcher. Approved. PT-Ox recommended due to CHF3 availability but material is approved for PT-MTL.
File 20140725 A. Gupta- Etching Cytop in PT-MTL etcher
PROM request form for etching Cytop spin on glass in PT-MTL etcher. Approved. PT-Ox recommended due to CHF3 availability but material is approved for PT-MTL.
File MSDS- Cytop 809M
Asahi MSDS for Cytop 809M
File Cytop processing notes
Processing notes for Cytop

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