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20140725 A. Gupta- Etching FOx-22 SOG in PT-Ox

Request and supporting materials to etch FOx-22 Spin on Glass in PT-Ox
File 20140725 A. Gupta- Etching FOx-22 in PT-Ox
PROM request to etch FOx-22 in PT-Ox. Approved.
File MSDS FOx Spin on Glass
Vendor provided MSDS for Dow Fox 22 Flowable Oxide

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