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20140725 A. Gupta- Etching FOx spin on glass in PT-MTL

PROM form and supporting materials for etching FOx spin on glass in PT-MTL. Approved although PT-Ox recommended due to CHF3 availability.
File 20140725 A. Gupta- Etching FOx spin on glass in PT-MTL
PROM form to use FOx spin on glass in PT-MTL etcher. Approved although PT-Ox recommended due to availability of CHF3.
File MSDS FOx-22
Vendor provided MSDS for Dow FOx 22 Flowable Oxide

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