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20141007 J. Park- InAs on GaAs in Fiji2 and Savannah

Request to process InAs deposited on GaAs in gold-contamination ALD tools (Savannah and Fiji2). Approved for documented quantities and processes.
File 20141007 J. Park- InAs on GaAs piece in Fiji2 and Savannah.
PROM request to process InAs deposited on GaAs in gold-contamination ALD tools (Savannah and Fiji2). Approved for documented quantities. Pieces need to cool in load lock on Fiji2 before retrieval.
File MSDS InAs
MSDS for InAs
File MSDS GaAs
MSDS for GaAs

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