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20141010 A. Gupta- CCP PECVD on FOx-22

Request to deposit dielectric material using CCP PECVD on FOx-22 SOG. Request approved.
File 20141010 A. Gupta- CCP PECVD on FOx-22
PROM form requesting CCP PECVD on FOx-22 SOG. Request approved.
File MSDS FOx-22
MSDS for Dow FOx-22 SOG

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