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20141013 T. English- Polyimide MLD

Request to use MVD to develop polyimide film deposition.
File 20141013 T. English- Polyimide MLD
PROM request to use MVD to develop polyimide film deposition.
File EE412 Proposal for Polyimide MLD
supporting document
File MSDS-APTMS
MSDS for APTMS
File MSDS- ODA
MSDS for ODA
File MSDS-PDA
MSDS for PDA
File MSDS-PDMA
MSDS for PDMA
File Atomic Layer Deposition of Polyimide Films
Supporting research paper-Journal of Materials Chemistry, Nov 2006. Putkonen, Harjuoja, Sajavaara, and Niinisto.

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