Skip to content. | Skip to navigation

Sections
Personal tools
You are here: Home / Materials/Chemicals / Process or Materials Review Requests (PROM) and Form / 2014 PROM Requests / 20141024 A. El-Ghazaly- Slightly Elevated Temperature Processing of HF
Navigation
 

20141024 A. El-Ghazaly- Slightly Elevated Temperature Processing of HF

Request to use SNF to etch PZT materials using elevated temperature HF solution. Request rejected due to safety concerns.
File 20141024 A. El-Ghazaly- Slightly Elevated Temperature Processing of HF
PROM request to use SNF to etch PZT materials in elevated temperature HF solution. Request rejected due to safety concerns.
File WET ETCHING & UNIFORM WAFER-LEVEL THINNING OF BULK PIEZOELETRIC CERAMICS ON SILICON
Supporting research paper. Attaka, et. al, 2012

Document Actions