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20141031 J. Park- ALD film thickness 150nm

Request to deposit 150nm of film in ALD (50nm is upper limit). Request approved.
File 20141031 J. Park- ALD film thickness 150nm
PROM form requesting 150nm of ALD film. Request approved.
File Electrically Tunable Metasurface Perfect Absorbers for Ultrathin Mid- Infrared Optical Modulators
Supporting research paper for request. Nanoletters, Sept 2014. Yao, Shankar, et. al.

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