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20141106 D. Nam- Request for 150nm ALD film

Request to deposit 150nm Al2O3 in ALD. Request rejected due to insufficient information regarding need for ALD.
File 20141106 D. Nam- Request for 150nm ALD film
PROM request to deposit 150nm Al2O3 in ALD. Request rejected due to insufficient information regarding use of ALD vs. other deposition methods.

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