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20150202 K. Harrison- Contamination Study of Semi-Clean SiGe Etch in LAMpoly

PROM request to perform contamination study of Semi-Clean SiGe in LAMpoly. Approved for study. Resubmission is required after data is collected.

20150202 K. Harrison- Contamination Study of Semi-Clean SiGe Etch in LAMpoly

PROM form for contamination study request. Approved for study. Resubmission is required after data is collected.

20150202 K. Harrison- Contamination Study of Semi-Clean SiGe Etch in LAMpoly - Read More…

Contamination study results

VPD-ICPMS data regarding LAMPOLY contamination levels before and after running contaminated wafers. Data shows no increase in contamination with wafer processing.

Contamination study results - Read More…

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