Skip to content. | Skip to navigation

Sections
Personal tools
You are here: Home / Materials/Chemicals / Process or Materials Review Requests (PROM) and Form / 2015 PROM Requests / 20150316 K. Harrison- Process flow for etching Silicon Germanium on contaminated wafers with aluminum in LAMpoly (clean)
Navigation
 

20150316 K. Harrison- Process flow for etching Silicon Germanium on contaminated wafers with aluminum in LAMpoly (clean)

PROM request outlining data collection strategy.

Document Actions