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2016 PROM REQUESTS SUMMARY TABLE

Index of PROM Requests for 2016
Date Title Requester Description Status
1/19/2016 Request to use SG-5001L Color Resist
Labmember Request to use SG-5001L Color Resist in SNF. Approved.  Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for details.
1/19/2016  Request to allow using attachments on Woollam ellipsometer that enable characterization of liquid samples  Naik, G.  Request to create liquid sample attachments for Woollam.  Approved. 
 2/02/2016 Spin coat polyimide in Fiji2
Kim, H.
Request to allow spin coated PI in Fiji2.
Approved.
3/14/2016
H2 Anneal in CVD Nano Tube Tool of Silicon for Smoothing Sidewall Scallops Formed During Bosch Process Deep Silicon Etch Menche, D.
Request to create Si smoothing process in CNT furnace (similar to Epi process but in contamintated category furnace).
Approved.
3/14/2016 XeF2 etching of Si pillars implanted in retina fixed in resin Lei, X.
Request to use XeF2 etcher to etch rat retina embedded with Si.
Approved.
3/21/2016
Request to use Zeocoat ES2110-10 Labmember
Request to use Zeocoat ES2110-10 in SNF.
Approved.  Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for details.
3/29/2016  Bringing Transene TE-100 into SNF Huang, T.
Request to bring new chemical into SNF for ITO etch.
Approved.  Waste must be collected and tagged for disposal.
 4/1/2016 ALD Deposition on Carbon Felts
 Xie, J.
 Request to use Fiji2 for Carbon Felt substrate.
Approved.
 4/8/2016  ITO Etching in Ox35
Huang, T.
Request to change contamination level and use Ox35 for ITO etching.
Approved with ongoing data collection.
 4/25/2016  Request to use DL1000C Polyimide
Labmember Request to use DL1000C Polyimide in SNF
Approved.  Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for details.
4/27/2016
Request to run Fiji3 as Semiclean
Hu, X.
VPD-ICPMS Data collection done to demonstrate procedure will allow Fiji3 to operate as semiclean.
Data collected and reviewed by committee.  Approved.
5/4/2016
Request to use Envirotex Lite Resin in nSiL
Chang, T.
Request to spin coat Envirotex Lite Resin in nSiL Spin coater.
Approved.
5/6/2016
Request to use Dynaloy Dynastrip
Menche, D.
Request to use Dynaloy Dynasrip in the SNF.
Approved for use in the solvent bench.  Separate waste collection and tagging required.
6/13/2016
Request for new Cu Etchant
Labmember
Request to use new copper etchant.
Approved.  Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for details.
6/14/2016
Request to spin coat birnessite
Hausleden, D.
Request to spin coat MnO2 slurry in CMP room spin coater.
Approved.
6/29/2016
Request to move transfer station into nSiL glovebox
McClellan, C.
Transfer station will be available for shared use.
Approved.

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