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2016 PROM Requests

PROM Request forms and supporting documents from 2016

20160202 H. Kim- Polyimide in Fiji2

PROM request to allow spin on polyimide film in Fiji2. Request approved.

20160202 H. Kim- Polyimide in Fiji2 - Read More…

20160329 T. Huang- Bringing Transene TE-100 into SNF

PROM request and supporting materials to try new ITO etch chemistry. Request approved with separate waste collection and tagging.

20160329 T. Huang- Bringing Transene TE-100 into SNF - Read More…

20160401 J. Xie- ALD deposition on Carbon Felts

PROM request to use Fiji2 for Pt deposition on Carbon Felt. Request approved.

20160401 J. Xie- ALD deposition on Carbon Felts - Read More…

20160408 T. Huang- ITO in Ox35

PROM request and supporting documents to change contamination level and allow ITO in Ox35. Request approved with ongoing data collection.

20160408 T. Huang- ITO in Ox35 - Read More…

20160506 D. Menche- Dynaloy Dynastrip DL9150

PROM form and supporting documents to use Dynaloy Dynastrip DL9150 for wafer cleaning.

20160506 D. Menche- Dynaloy Dynastrip DL9150 - Read More…

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