Skip to content. | Skip to navigation

Sections
Personal tools
You are here: Home / Materials/Chemicals / Process or Materials Review Requests (PROM) and Form / 2016 PROM Requests / 20160304 D. Menche- H2 Anneal in CVD Nano Tube Tool of Silicon for Smoothing Sidewall Scallops Formed During Bosch Process Deep Silicon Etch

20160304 D. Menche- H2 Anneal in CVD Nano Tube Tool of Silicon for Smoothing Sidewall Scallops Formed During Bosch Process Deep Silicon Etch

PROM Form to create Silicon smoothing anneal process in gold-contaminated CNT furnace. Request approved.

Document Actions