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You are here: Home / Materials/Chemicals / Process or Materials Review Requests (PROM) and Form / 2017 PROM Requests / 20170517 T. Bozorg-Grayeli- Thick low-temp ALD Al2O3 for Insulating Spacers

20170517 T. Bozorg-Grayeli- Thick low-temp ALD Al2O3 for Insulating Spacers

PROM form for long ALD run outside of standard operating procedure. Request approved.

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