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Polysilicon characterization

The objective is to characterize poly film properties as a function of deposition and anneal conditions. For more information about this project, contact labmember maryamzm.
Low Stress PolySi -Exptl Plan
Experimental plan proposal for characterization of a low stress poly- or amorphous silicon process. Proposed and performed by rik.
File Low Stress PolySi Characterization Report
Rishi's final characterization report, of September 2009.

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