About EE412: Advanced Nanofabrication Laboratory
This is a project-based course focused on the development or characterization of processing methods used for the fabrication of devices in the Stanford Nanofabrication Facility (SNF). The SNF is a shared-use cleanroom providing micro- and nano- fabrication equipment and processing know-how for a diverse range of research areas including: chemistry, earth science, materials science & engineering, life sciences, medicine, optics, and physics, as well as the more traditional fields of electronics and MEMS devices. In this course, students will have the opportunity to choose among several available projects or propose their own, with the objective of gaining experience in the practical aspects of process development as well as contributing towards the SNF library of processing methods.
Each project will involve one or more aspects of fabrication, such as: wafer cleaning, photolithography, plasma etching of various materials, low pressure or plasma enhanced chemical vapor deposition, epitaxial films, metal film deposition.