This folder contains process modules related to photolithography such as Lift Off procedures, SU8 procedures, how to work with Polyimide, information about Standard Resists offered at SNF.
This folder contains etch modules for wet and dry etching of various materials in SNF.
This folder contains processes and procedures relating to oxidation furnaces, tylan1-6 and thermco1 and 2. They include clean, semi-clean and contaminated furnaces.
Tylan Recipes: 410 anneal bicmos dry fga ftal lto nitride nmos oldfiles pgild poly predep sigari tc train tube8 waltie wet
This folder contains cleaning and photoresist stripping procedures for varied substrate materials and labware. Tweezer cleaning is included.
This device is an abbreviated MOS structure run every year in the EE410 class. Though not really a "baseline" process for the lab, the process/mask set routinely produces functional devices that many researchers use as a starting point for their experiments.
Processing procedures for Ebeam resists.