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Etching

This folder contains etch modules for wet and dry etching of various materials in SNF.

Wet Etching

This folder contains modules that use wet etchants such as BOE, Al, Pad etch, etc for various materials.

Wet Etching - Read More…

Dry Etching

This folder contains process modules about dry (or plasma) etching of various materials such as oxide, polysilicon, Al, photoresist (including descum) etc.

Dry Etching - Read More…

Etch Rates for Various Etchants Wet and Dry

This 2003 IEEE paper contains charts of etches performed at UC Berkeley. Some of the processes mentioned in it are not applicable to SNF but may be used as a basis of comparison or starting point for processes available in the facility.

Etch Rates for Various Etchants Wet and Dry - Read More…

Etch Rates for Various Etchants Wet and Dry

This paper from 1996 contains charts of etchants, materials and etch rate. Some of the etchants may be available in SNF.

Etch Rates for Various Etchants Wet and Dry - Read More…

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