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Etching

This folder contains etch modules for wet and dry etching of various materials in SNF.

Wet Etching

This folder contains modules that use wet etchants such as BOE, Al, Pad etch, etc for various materials.

Wet Etching - Read More…

Dry Etching

This folder contains process modules about dry (or plasma) etching of various materials such as oxide, polysilicon, Al, photoresist (including descum) etc.

Dry Etching - Read More…

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