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Etch Rates for Various Etchants Wet and Dry

This 2003 IEEE paper contains charts of etches performed at UC Berkeley. Some of the processes mentioned in it are not applicable to SNF but may be used as a basis of comparison or starting point for processes available in the facility.

PDF document icon UCBtchRates2(2003).pdf — PDF document, 1051 kB (1076709 bytes)

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