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Wet Etching

This folder contains modules that use wet etchants such as BOE, Al, Pad etch, etc for various materials.
Si Wet Etching at SNF
This folder contains information and links about Si etching using KOH and TMAH.
Silicon Dioxide (SiO2) Wet Etching at SNF
This folder contains information about oxide etching at SNF.
Silicon Nitride Wet Etching and Stripping
This folder contains process modules concerning the etching and stripping of silicon nitride for all levels of contamination.

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