This folder contains modules that use wet etchants such as BOE, Al, Pad etch, etc for various materials.
- Si Wet Etching at SNF
- This folder contains information and links about Si etching using KOH and TMAH.
- Silicon Dioxide (SiO2) Wet Etching at SNF
- This folder contains information about oxide etching at SNF.
- Silicon Nitride Wet Etching and Stripping
- This folder contains process modules concerning the etching and stripping of silicon nitride for all levels of contamination.